TY - JOUR N2 - The techniques of micro and nano structurization of surfaces of various materials are utilized in electronics and medicine. Such procedure as wet and dry etching allows to fabricate protruded or recessed micro and nanostructures on the surface. In the paper some examples of utilization of a surface structurization, known from literature, are described. Some structurization methods and experimental results for fabrication of the arrays of sharp microtips are presented. Wet and/or dry etching, and thermal oxidation process were used to form the arrays of sharp gated and non-gated, protruded or recessed silicon microtips on silicon wafer. For the first time, the arrays of silicon carbide (SiC) microtips on glass wafer have been produced by use of the transfer mold technique. Arrays of sharp microtips are used as field electron emission cathodes for vacuum microelectronics devices. Some electron emission measurements for these cathodes have been carried out. New application of silicon microtips array in biochemistry has been tested with satisfactory results. L1 - http://www.journals.pan.pl/Content/111796/PDF-MASTER/(53-4)433.pdf L2 - http://www.journals.pan.pl/Content/111796 PY - 2005 IS - No 4 EP - 440 KW - silicon tips KW - SiC tips KW - transfer mold technique KW - field emission KW - FEA A1 - Górecka-Drzazga, A. VL - vol. 53 DA - 2005 T1 - Micro and nano structurization of semiconductor surface SP - 433 UR - http://www.journals.pan.pl/dlibra/publication/edition/111796 T2 - Bulletin of the Polish Academy of Sciences Technical Sciences ER -