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[References = "Kleps I. \(2001\), Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application, Solid\-State Electronics, 45, 997, doi.org\/10.1016\/S0038\-1101\(01\)00148\-4"]
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Bulletin of the Polish Academy of Sciences Technical Sciences (1)
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Vacuum microdevices
T. Grzebyk
A. Górecka-Drzazga
Bulletin of the Polish Academy of Sciences Technical Sciences | 2012 | 60 | No 1
| 19-23 | DOI:
10.2478/v10175-012-0004-y
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T. Grzebyk
A. Górecka-Drzazga
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