@ARTICLE{Grzebyk_T._Characterization_2018, author={Grzebyk, T. and Górecka-Drzazga, A.}, volume={66}, number={No 2 (Special Section on Nano- and Micromechanics)}, journal={Bulletin of the Polish Academy of Sciences Technical Sciences}, pages={173-178}, howpublished={online}, year={2018}, title={Characterization of the ionization process inside a miniature glow-discharge micropump}, URL={http://www.journals.pan.pl/Content/106426/PDF/173-178_00630_Bpasts_66No2_30.04.18_K.pdf}, keywords={ion-sorption micropump, MEMS-type micropump, gas discharge, ionization}, }