@ARTICLE{Belavič_Darko_The_2012, author={Belavič, Darko and Zarnik, Marina}, number={No 1}, journal={Metrology and Measurement Systems}, pages={133-140}, howpublished={online}, year={2012}, publisher={Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation}, abstract={LTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.}, type={Artykuły / Articles}, title={The Effect of Humidity on the Stability of LTCC Pressure Sensors}, URL={http://www.journals.pan.pl/Content/89877/PDF/Journal10178-VolumeXIX%20Issue1_12paper.pdf}, doi={10.2478/v10178-012-0012-0}, keywords={Thick-film piezoresistive sensors, capacitive pressure sensors, offset stability, relative humidity}, }