[1] X. Liu, K. Kim, and Y. Sun. A MEMS stage for 3-axis nanopositioning. Journal of Micromechanics and Microengineering, 17(9):1796–1802, 2007. doi: 10.1088/0960-1317/17/9/007.
[2] R. Legtenberg, A.W. Groeneveld, and M. Elwenspoek. Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering, 6(3):320–329, 1996. doi: 10.1088/0960-1317/6/3/004.
[3] S. Abe, M.H. Chu, T. Sasaki, and K. Hane. Time response of a microelectromechanical silicon photonic waveguide coupler switch. IEEE Photonics Technology Letters, 26(15):1553–1556, 2014. doi: 10.1109/lpt.2014.2329033.
[4] T.Q. Trinh, L.Q. Nguyen, D.V. Dao, H.M. Chu, and H.N. Vu, Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling. Microsystem Technologies, 20(2):281–289, 2014. doi: 10.1007/s00542-013-1947-0.
[5] Y.J. Huang, T.L. Chang, and H.P. Chou. Novel concept design for complementary metal oxide semiconductor capacitive z-direction accelerometer. Japanese Journal of Applied Physics, 48(7):076508, 2009. doi: 10.1143/jjap.48.076508.
[6] A. Sharaf and S. Sedky. Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer. Microsystem Technologies, 19(8):1153–1163, 2013. doi: 10.1007/s00542-012-1714-7.
[7] Y. Matsumoto, M. Nishimura, M. Matsuura, and M. Ishida. Three-axis SOI capacitive accelerometer with PLL C–V converter. Sensors and Actuators A: Physical, 75(1):77–85, 1999. doi: 10.1016/s0924-4247(98)00295-7.
[8] D. Peroulis, S.P. Pacheco, K. Sarabandi, and L.P.B. Katehi. Electromechanical considerations in developing low-voltage RF MEMS switches. IEEE Transactions on Microwave Theory and Techniques, 51:259–270, 2003. doi: 10.1109/TMTT.2002.806514.
[9] Y. Liu. Stiffness Calculation of the microstructure with crab-leg flexural suspension. Advanced Materials Research, 317-319:1123–1126, 2011. doi: 10.4028/www.scientific.net/AMR.317-319.1123.
[10] H.M. Chou, M.J. Lin, and R. Chen. Investigation of mechanics properties of an awl-shaped serpentine microspring for in-plane displacement with low spring constant-to-layout area. Journal of Micro/Nanolithography MEMS and MOEMS, 15(3):035003, 2016. doi: 10.1117/1.JMM.15.3.035003.
[11] D.V. Hieu, L.V. Tam, N.V. Duong, N.D. Vy, and C.M. Hoang. Design and simulation analysis of a z axis microactuator with low mode cross-talk. Journal of Mechanics, 36(6):881–888, 2020. doi: 10.1017/jmech.2020.48.
[12] D.V. Hieu, L.V. Tam, K. Hane, and M.H. Chu. Design and simulation analysis of an integrated XYZ micro-stage for controlling displacement of scanning probe. Journal of Theoretical and Applied Mechanics, 59(1):143–156, 2021. doi: 10.15632/jtam-pl/130549.
[13] F. Hu, W. Wang, and J. Yao. An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation. Micromechanics and Microengineering, 21(11):115029, 2011. doi: 10.1088/0960-1317/21/11/115029.
[14] W. Wai-Chi, A.A. Azid, and B.Y. Majlis. Formulation of stiffness constant and effective mass for a folded beam. Archives of Mechanics, 62(5):405–418, 2010.
[15] Y. Cao and Z. Xi. A review of MEMS inertial switches. Microsystem Technologies, 25(12):4405–4425, 2019. doi: 10.1007/s00542-019-04393-4.
[16] K.R. Sudha, K. Uttara, P.C. Roshan, and G.K. Vikas. Design and analysis of serpentine based MEMS accelerometer. AIP Conference Proceedings, 1966:020026, 2018. doi: 10.1063/1.5038705.
[17] H.M. Chou, M.J. Lin, and R. Chen. Fabrication and analysis of awlshaped serpentine microsprings for large out-of-plane displacement. Journal of Micromechanics and Microengineering, 25:095018, 2015. doi: 10.1088/0960-1317/25/9/095018.
[18] C.M. Hoang, and K. Hane. Design fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner. Sensors and Actuators A: Physical, 165(2): 422–430, 2011. doi: 10.1016/j.sna.2010.11.004.
[19] G. Barillaro, A. Molfese, A. Nannini, and F. Pieri. Analysis simulation and relative performances of two kinds of serpentine springs. Journal of Micromechanics and Microengineering, 15(4):736–746, 2005. doi: 10.1088/0960-1317/15/4/010.
[20] P.B. Chu, I. Brener, C. Pu, S.S. Lee, J.I. Dadap, S. Park, K.Bergman et al. Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch. Journal of Microelectromechanical Systems, 14(2):261–273, 2005. doi: 10.1109/JMEMS.2004.839827.
[21] G.D.J. Su, S.H. Hung, D. Jia, and F. Jiang. Serpentine Spring corner designs for micro-electro-mechanical systems optical switches with large mirror mass. Optical Review, 12(4):339–344, 2005. doi: 10.1007/s10043-005-0339-9.
[22] A. Khlifi, A. Ahmed, S. Pandit, B. Mezghani, R. Patkar, P. Dixit, and M.S. Baghini. Experimental and theoretical dynamic investigation of MEMS Polymer mass-spring systems. IEEE Sensors Journal, 20(19):11191–11203, 2020. doi: 10.1109/JSEN.2020.2996802.
[23] J. Wu, T. Liu, K. Wang, and K. Sørby. A measuring method for micro force based on MEMS planar torsional spring. Measurement Science and Technology, 32(3):035002, 2020. doi: 10.1088/1361-6501/ab9acd.
[24] Z. Rahimi, J. Yazdani, H. Hatami, W. Sumelka, D. Baleanu, and S. Najafi. Determination of hazardous metal ions in the water with resonant MEMS biosensor frequency shift – concept and preliminary theoretical analysis. Bulletin of the Polish Academy of Sciences: Technical Sciences, 68(3): 529–537, 2020. doi: 10.24425/bpasts.2020.133381.
[25] K.G. Sravani, D. Prathyusha, C. Gopichand, S.M. Maturi, A. Elsinawi, K. Guha, and K. S. Rao. Design, simulation and analysis of RF MEMS capacitive shunt switches with high isolation and low pull-in-voltage. Microsystem Technologies, 28:913–928, 2022. doi: 10.1007/s00542-020-05021-2.
[26] N. Lobontiu and E. Garcia. Mechanics of Microelectromechanical Systems. Kluwer Academic Publishers, 2005. doi: 10.1007/b100026.
[27] H.A. Rouabah, C.O. Gollasch, and M. Kraft. Design optimisation of an electrostatic MEMS actuator with low spring constant for an “Atom Chip”. In Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, volume 3, pages 489–492, 2002.
[28] R. Raymond and J. Raymond. Roark's Formulas for Stress and Strain. McGraw-Hill, 1989.
[29] M.S. Weinberg and A. Kourepenis. Error sources in in-plane silicon tuning-fork MEMS gyroscopes. Journal of Microelectromechanical Systems, 15(3):479–491, 2006. doi: 10.1109/jmems.2006.876779.

[1] S. Wang, T. Moan, and Z. Jiang. Influence of variability and uncertainty of wind and waves on fatigue damage of a floating wind turbine drivetrain. Renewable Energy, 181:870–897, 2022. doi: 10.1016/j.renene.2021.09.090.
[2] Z. Yu, C. Zhu, J. Tan, C. Song, and Y. Wang. Fully-coupled and decoupled analysis comparisons of dynamic characteristics of floating offshore wind turbine drivetrain. Ocean Engineering, 247:110639, 2022. doi: 10.1016/j.oceaneng.2022.110639.
[3] F.K. Moghadam and A.R. Nejad. Online condition monitoring of floating wind turbines drivetrain by means of digital twin. Mechanical Systems and Signal Processing, 162:108087, 2022. doi: 10.1016/j.ymssp.2021.108087.
[4] W. Shi, C.W. Kim, C.W. Chung, and H.C. Park. Dynamic modeling and analysis of a wind turbine drivetrain using the torsional dynamic model. International Journal of Precision Engineering and Manufacturing, 14(1):153–159, 2013. doi: 10.1007/s12541-013-0021-2.
[5] M. Todorov and G. Vukov. Parametric torsional vibrations of a drive train in horizontal axis wind turbine. In Proceeding of the 1st Conference Franco-Syrian about Renewable Energy, pages 1–17, Damas, 24-28 October, 2010.
[6] R.C. Juvinall and K.M. Marshek. Fundamentals of Machine Component Design. John Wiley & Sons, 2020.
[7] Q. Zhang, J. Kang, W. Dong, and S. Lyu. A study on tooth modification and radiation noise of a manual transaxle. International Journal of Precision Engineering and Manufacturing, 13(6):1013–1020, 2012. doi: 10.1007/s12541-012-0132-1.
[8] B. Shlecht, T. Shulze, and T. Rosenlocher. Simulation of heavy drive trains with multimegawatt transmission power in SimPACK. In: SIMPACK Users Meeting, Baden-Baden, Germany, 21-22 March, 2006.
[9] M. Todorov and G. Vukov. Modal properties of drive train in horizontal axis wind turbine. The Romanian Review Precision Mechanics, Optics & Mechatronics, 40:267–275, 2011.
[10] D. Lee, D.H. Hodges, and M.J. Patil. Multi‐flexible‐body dynamic analysis of horizontal axis wind turbines. Wind Energy, 5(4):281–300, 2002. doi: 10.1002/we.66.
[11] F.L.J. Linden, P.H. Vazques, and S. Silva. Modelling and simulating the efficiency and elasticity of gearboxes, In Proceeding of the 7th Modelica Conference, pages 270–277, Como, 20-22 September, 2009.
[12] J. Wang, D. Qin, and Y. Ding. Dynamic behavior of wind turbine by a mixed flexible-rigid multi-body model. Journal of System Design and Dynamics, 3(3):403–419, 2009. doi: 10.1299/jsdd.3.403.
[13] A.A. Shabana. Computational Dynamics. John Wiley & Sons. 2009.
[14] A.K. Chopra. Dynamics of Structures. Pearson Education India. 2007.
[15] Y. Park, H. Park, Z. Ma, J. You, J. and W. Shi. Multibody dynamic analysis of a wind turbine drivetrain in consideration of the shaft bending effect and a variable gear mesh including eccentricity and nacelle movement. Frontiers in Energy Research, 8:604414, 2021. doi: 10.3389/fenrg.2020.604414.
[16] S.R. Singiresu. Mechanical Vibrations. Addison Wesley. 1995.
[17] R.R. Craig Jr and A.J. Kurdila. Fundamentals of Structural Dynamics. John Wiley & Sons. 2006.
[18] K.J. Bathe. Finite Element Procedures. Klaus-Jurgen Bathe. 2006.
[19] Y. Kim, C.W. Kim, S. Lee, and H. Park. Dynamic modeling and numerical analysis of a cold rolling mill. International Journal of Precision Engineering and Manufacturing, 14(3):407–413. 2013. doi: 10.1007/s12541-013-0056-4.
[20] S.J. Yoon and D.H. Choi. Reliability-based design optimization of slider air bearings. KSME International Journal, 18(10):1722–1729, 2004. doi: 10.1007/BF02984320.
[21] H.H. Chun,S.J. Kwon, T. and Tak. Reliability-based design optimization of automotive suspension systems. International Journal of Automotive Technology, 8(6):713–722, 2007.
[22] J. Fang, Y. Gao, G. Sun, and Q. Li. Multiobjective reliability-based optimization for design of a vehicledoor. Finite Elements in Analysis and Design, 67:13–21, 2013. doi: 10.1016/j.finel.2012.11.007.
[23] Y.L. Young, J.W. Baker, and M.R. Motley. Reliability-based design and optimization of adaptive marine structures. Composite Structures, 92(2):244–253, 2010. doi: 10.1016/j.compstruct.2009.07.024.
[24] G. Liu, H. Liu, C. Zhu, T. Mao, and G. Hu. Design optimization of a wind turbine gear transmission based on fatigue reliability sensitivity. Frontiers of Mechanical Engineering, 16(1):61–79, 2021. doi: 10.1007/s11465-020-0611-5.
[25] H. Li, H. Cho, H. Sugiyama, K.K. Choi, and N.J. Gaul. Reliability-based design optimization of wind turbine drivetrain with integrated multibody gear dynamics simulation considering wind load uncertainty. Structural and Multidisciplinary Optimization, 56 (1):183–201, 2017. doi: 10.1007/s00158-017-1693-5.
[26] C. Luo, B. Keshtegar, S.P. Zhu, O. Taylan, O. and X.P. Niu. Hybrid enhanced Monte Carlo simulation coupled with advanced machine learning approach for accurate and efficient structural reliability analysis. Computer Methods in Applied Mechanics and Engineering, 388:114218. doi: 10.1016/j.cma.2021.114218.