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Abstrakt

This paper presents a probabilistic machine learning approach to approximate wavelength values for unmeasured positions on an opto-semiconductor wafer after epitaxy. Insufficient information about optical and opto-electronic properties may lead to undetected specification violations and, consequently, to yield loss or may cause product quality issues. Collection of information is restricted because physical measuring points are expensive and in practice samples are only drawn from 120 specific positions. The purpose of the study is to reduce the risk of uncertainties caused by sampling and measuring inaccuracy and provide reliable approximations. Therefore, a Gaussian process regression is proposed which can determine a point estimation considering measuring inaccuracy and further quantify estimation uncertainty. For evaluation, the proposed method is compared with radial basis function interpolation using wavelength measurement data of 6-inch InGaN wafers. Approximations of these models are evaluated with the root mean square error. Gaussian process regression with radial basis function kernel reaches a root mean square error of 0.814 nm averaged over all wafers. A slight improvement to 0.798 nm could be achieved by using a more complex kernel combination. However, this also leads to a seven times higher computational time. The method further provides probabilistic intervals based on means and dispersions for approximated positions.
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Autorzy i Afiliacje

Stefan M. Stroka
1 2
ORCID: ORCID
Christian Heumann
1
ORCID: ORCID
Fabian Suhrke
2
Kathrin Meindl
2

  1. Department of Statistics, Faculty of Mathematics, Informatics and Statistics, LMU Munich, 80539 Munich, Germany
  2. ams-OSRAM International GmbH, 93055 Regensburg, Germany

Abstrakt

Press horoscopes are texts that include prophecies to be interpreted by the reader and adjusted to his or her own individual situation. The structure, vocabulary and syntax of horoscopes are characterized by stereotypy and conventionalism. Therefore, all kinds of linguistic schemata, colloquial expressions, idioms, collocations and proverbs can well be applied. This paper shows the forms and functions of such phrases in German and Polish horoscopes.
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Autorzy i Afiliacje

Czesława Schatte

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